• Українська
  • English

< | >

Current issue   Ukr. J. Phys. 2016, Vol. 61, N 3, p.240-247
doi:10.15407/ujpe61.03.0240    Paper

Vinichenko V.A., Buchenko V.V., Goloborodko N.S., Lendel V.V., Lushkin A.E., Telega V.N. 1,2

Taras Shevchenko National University of Kyiv, Faculty of Physics
(64/13, Volodymyrs’ka Str., Kyiv 01601, Ukraine; e-mail: vbuchenko@yandex.ua)

Optical and Electrophysical Properties of 95% In2O3 + 5% SnO2/ns-Si Heterostructure

Section: Solid Matter
Original Author's Text: Ukrainian

Abstract: Optical and electrical properties of 95% In2O3 + 5% SnO2/ns-Si heterostructures with films 6 and 12 nm in thickness deposited on a nanostructured silicon surface by the magnetron sputtering have been considered. It is shown that the 6-nm film is characterized by several peaks in the optical absorption spectrum, while the 12-nm film has no absorption peaks in the same spectral interval. The influence of the environment and the optical irradiation on the electrical properties of 95% In2O3 + 5% SnO2/ns-Si structures is determined. Their response to the gas environment is shown to be governed by the dielectric permittivity of an adsorbate. The results obtained can be used in the development of resistive gas sensors based on 95% In2O3 + 5% SnO2/ns-Si films.

Key words: current-voltage characteristics, absorption spectrum, thin films, transparent oxides.

References:
1. Y. Sato, R. Tokumaru, E. Nishimura, P. Song, Yu. Shigesato, K. Utsumi, and H. Iigusa, J. Vac. Sci. Technol. A 23, 1167 (2005).   CrossRef
2. G. Korotcenkov, Mater. Sci. Eng: B 139, 1 (2007).   CrossRef
3. B.R. Eggins, Biosensors: An Introduction (Wiley, Chichester, 1996).   CrossRef
4. An Introduction to Bioanalylical Sensors Techniques in Analytical Chemistry, edited by A.J. Cunningham (Wiley, Chichester, 1996).
5. Gas Sensors Principles, Operation, and Developments, edited by G. Sberveglieri (Kluwer, Dordrecht, 1992).
6. Semiconductor Sensors in Physico-Chemical Studies: Handbook of Sensors and Actuators, edited by L.Y. Kupriyanov (Elsevier, Amsterdam, 1996).
7. S.Y. Yurish, Digital Sensors and Sensor Systems: Practical Design (IFSA, Barcelona, 2011).
8. A. Ayeshamariam, M. Bououdina, and C. Sanjeeviraja, Mater. Sci. Semicond. Process. 16, 686 (2013).   CrossRef
9. L.A. Obvintseva, Ross. Khim. Zh. 52, 113 (2008).
10. S.I. Rembeza, E.S. Rembeza, T.V. Svistova, and O.I. Borsyakova, Fiz. Tekh. Poluprovodn. 40, 57 (2006).
11. S.I. Rembeza, Yu.V. Shmatova, T.V.Svistova, E.S. Rembeza, and N.N.Koshelev, Fiz. Tekh. Poluprovodn. 46, 1213 (2012).
12. S.K. Tripathy, B.P. Hota, and V.S. Jahnavy, Zh. NanoElectron. Fiz. 5, 04055 (2013).
13. S.I. Rembeza, P.E. Voronov, B.M. Sinelnikov, and E.S. Rembeza, Fiz. Tekh. Poluprovodn. 45, 1538 (2011).
14. D.I. Bilenko, O.Ya. Belobrovaya, E.A. Zharkova, D.V. Terin, and E.I. Khasina, Fiz. Tekh. Poluprovodn. 39, 834 (2005).
15. O.I. Bomk, L.G. Il'chenko, V.V. Il'chenko, A.M. Pinchuk, V.M. Pinchuk, G.V. Kuznetsov, V.I. Strykha, Sensor. Actuat. B 62, 131 (2000).   CrossRef
16. R. Balasundaraprabhua, E.V. Monakhova, N. Muthukumarasamyb, O. Nilsena, and B.G. Svenssona, Mater. Chem. Phys. 114, 425 (2009).   CrossRef
17. Dewei Chu, Yu Ping Zeng, Dongliang Jiang, and Yo. Masuda, Sensor. Actuat. B 137, 630 (2009).   CrossRef
18. Zhizhong Yuan, Dongsheng Li, Minghua Wang, Peiliang Chen, Daoren Gong, Peihong Cheng, and Deren Yang, Appl. Phys. Lett. 92, 121908 (2008).   CrossRef
19. H.B. Huo, C. Wang, F.D. Yan, H.Z. Ren, and M.Y. Shen, J. Nanosci. Nanotechnol. 9, 4817 (2009).   CrossRef   PubMed
20. L.G. Il'chenko, A.A. Chuiko, V.V. Lobanov, and V.V. Il'chenko, in Technical Digest of the 18th International Vacuum Nanoelectronics Conference (IVNC 2005) (Oxford, 2005), p. 200.   CrossRef
21. A.I. Belyaeva, A.A. Galuza, and S.N. Kolomiets, Fiz. Tekh. Poluprovodn. 38, 1050 (2004).
22. O.I. Barchuk, A.A. Goloborodko, V.N. Kurashov, Y.A. Oberemok, and S.N. Savenkov, Proc. SPIE 6254, 62540W (2006).   CrossRef
23. O.I. Barchuk, T.V. Molebna, A.G. Chumakov, V.N. Kurashov, and V.V. Marjenko, Proc. SPIE 2648, (1995).   CrossRef
24. A.A. Goloborodko, M.V. Epov, L.Y. Robur, and T.V. Rodionova, Zh. Nano-Electron. Fiz. 6, 02002 (2014).
25. H. Fujiwara, Spectroscopic Ellipsometry. Principles and Applications (Wiley, Chichester, 2007).   CrossRef
26. L.A. Golovan', V.Yu. Timoshenko, and P.K. Kashkarov, Usp. Fiz. Nauk 177, 619 (2007).   CrossRef
27. G.E. Jellison, T.E. Haynes, and H.H. Burke, Opt. Mater. 2, 105 (1993).   CrossRef
28. A.A. Goloborodko, Zh. Nano-Electron. Fiz. 5, 03048 (2013).
29. N.S. Goloborodko, V.M. Telega, and V.V. Il'chenko, in Abstratcts of the 8th International Scientific Conference "Electronics and Applied Physics" (Kyiv, 2012), p. 94.
30. Handbook of Chemical and Biological Sensors, edited by R.F. Taylor and J.S. Schultz (IOP Publishing House, Bristol, 1996).
31. V.V. Bolotov, V.E. Roslikov, E.A. Kurdyukova, A.V. Krivozubov, Yu.A.Sten'kin, and D.V. Cheredov, Fiz. Tekh. Poluprovodn. 46, 109 (2012).
32. A. Fort, M. Mugnaini, S. Rocchi, M.B. Serrano-Santos, V. Vignoli, and R. Spinicci, Sensor. Actuat. B 124, 245 (2007).   CrossRef
33. O.M. Lovvik, S. Diplas, A. Romanyuk, and A. Ulyashin, Appl. Phys. 115, 083705 (2014).   CrossRef
34. N.S. Goloborodko and V.V. Ilchenko, Visn. Kyiv. Univ. Ser. Fiz. Mat. Nauky, No. 3, 296 (2012).
35. M.G. Nakhodkin, Y.S. Musatenko, and V.N. Kurashov, Proc. SPIE 3402, 333 (1998).   CrossRef
36. A.O. Goloborodko, V.I. Grygoruk, M.M. Kotov, V.N. Kurashov, D.V. Podanchuk, and N.S. Sutyagina, Ukr. Fiz. Zh. 53, 946 (2008).
37. P.N. Krylov, R.M. Zakirova, and I.V. Fedotova, Fiz. Tekh. Poluprovodn. 47, 1421 (2013).
38. A.M. Gulyaev, Van Le Van, O.B. Sarach, and O.B. Mukhina, Fiz. Tekh. Poluprovodn. 42, 742 (2008).
39. S.I. Rembeza, N.N. Koshelev, E.S. Rembeza, T.V. Svistova, Yu.V. Shmatova, and Gang Xu, Fiz. Tekh. Poluprovodn. 45, 612 (2011).