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Ukr. J. Phys. 2015, Vol. 60, N 1, p.46-51
doi:10.15407/ujpe60.01.0046    Paper

Koval I.P., Len Yu.A., Nakhodkin M.G., Svishevs’kyi M.O., Yakovenko M.Yu.

Institute of Physics, National Academy of Sciences of Belarus
(68, Nezavisimosti Ave., Minsk 220072, Belarus; e-mail: a.baran@dragon.bas-net.by)

Interaction of Molecular Oxygen with Si(001) Surface Covered with a Chromium or Titanium Monolayer

Section: Solid matter
Language: Ukrainian

Abstract: The results of experimental researches concerning the initial stages of the interaction between the Si(001) surface covered with a chromium or titanium monolayer and molecular oxygen at exposures to 107 L (Langmuir) are reported. On the basis of experimental data, the coefficient of molecular oxygen sticking is calculated. It is shown that not only silicon but also titanium oxides are formed on the Si(001) surface covered with a titanium monolayer. The researches are carried out, by using the Auger electron spectroscopy method.

Key words: oxidation, chromium, titanium, silicon.